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CRISP: MBE, XPS & More
engineering facilities at Yale
||Analyze e-beam deflection noise using images of dots
|EBPG parameter calculator
||Calculate EBPG exposure parameters
||Flatten GDSII pattern files, removing hierarchy and rendering rotations, scaling, etc, as simple polygons.
||Print contents of a GDSII pattern file as text, which is useful for debugging CAD problems.
||A library of C functions for reading and writing GDSII pattern format. Example included.
|Line Edge Roughness
||Analyze line edge roughness using images of lines
||Set any current between 0.5 and 200 nA, and adjust lens 2 for optimal conjugate blanking. Installation instructions
|TIFF to GDS
||Convert TIFF images into GDSII format, e.g. for e-beam exposure
*This Python program will run on a Mac if you first install the GTK library.
The calculator will also run on a Windows PC running Cygwin - be sure to include Python while installing Cygwin.
To unpack downloaded files that end in ".tar", use the command
tar xvf filename.tar
To unpack downloaded files that end in ".tar.gz" or ".tgz" use the command
tar xvzf filename.tar.gz
To unpack files that end in ".zip"... If you need help with this then you really should not be attempting e-beam lithography. Go home and take a nap.
Look in the file INSTALL or install.txt for further instructions.
programs are open-source and are dependent on other open-source code.
They will run on nearly any distribution of GNU/Linux and are distributed
here under the GNU general public license.
search for dots in an image makes use of a recursive algorithm
which collects dark pixels that are connected to other dark pixels.
Shown here are pixels being identified and marked, along with
a cross marking the "center of mass" or running average
of the dot's center. Dots which contain too few pixels are discarded
as noise. Of course, the actual calculation is thousands of times
For more background and tips on using the noise analysis program,
click here for the presentation in PDF format (31 MB),
click here for the PowerPoint file (31 MB).